One of the key tasks of work package 5 is the development and design of physical vapour deposition (PVD) components for different layers and tailored processes. Within the work described in this report, PEPPERONI partner VON ARDENNE developed the appropriate concepts for PVD deposition tools suitable for a perovskite/silicon tandem pilot line. Partners evaluated several principles and parameters followed by experimental work to define the most efficient tools and processes for further development and implementation. The developed evaporation concepts can be integrated in VON ARDENNE’s HISS600 inline coating platform, see picture.